Based on the existing research experience of the Beijing Institute of Technology team in CMOS-MEMS integration, gyroscopes, 2.5D/3D integration, ASIC design, optical MEMS, acoustic MEMS, power devices, spectrometers, LIDAR, optical phased arrays, and biophotonics; the focus is on developing new micro-nano actuators and sensors with innovative mechanisms, materials, processes, and structures, as well as miniaturization, multifunctionalization, and integration of original technologies for devices and systems involving optics, acoustics, mechanics, electronics, heat, and magnetism.
On the MEMS process platform, various MEMS chips are developed, and based on these MEMS chips, a wide range of novel opto-acoustic-electric systems are created. Innovative opto-acoustic-electric micro-nano chips with independent intellectual property rights are developed for applications in biochemical detection, intelligent robots, optical communication, Internet of Things (IoT), autonomous driving, biomedicine, smart lighting, and other fields.
